• P-ISSN 0974-6846 E-ISSN 0974-5645

Indian Journal of Science and Technology


Indian Journal of Science and Technology

Year: 2010, Volume: 3, Issue: 1, Pages: 14-16

Original Article

Hydrogen sensing properties of indium doped tin oxide thin films deposited by spray pyrolysis


In this article the effect of indium impurity on tin oxide layers sensitivity have been studied. Tin oxide thin films without impurity and with different impurities are deposited by spray pyrolysis method and their structural layers have been characterized by x-ray diffraction spectrum and SEM technology. In different temperature we have calculated layer sensitivity. It is found that the most sensitivity is in the sample of 6% impurity at temperature of 200 °C. With increasing of impurity concentration the work temperature is decreased until in the 15% impurity sample the work temperature is decreased to 100 °C.
Keywords: Tin oxide, spray pyrolysis, thin films.


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