Indian Journal of Science and Technology

Abstract

We address the advancement and development of MEMS ultrasonic transducer for underwater applications. The development of MEMS transducer is investigated and proved that it is a viable concept. The flexibility in tailoring their frequency and acoustic impedance increases the potential of their application in various fields. Compared to conventional, MEMS offer the advantage of superior performance as far as bandwidth is concerned. In spite of their lower coupling coefficient, there is a potential for significant improvement. We present the latest design of the piezoelectric, pressure and capacitive transducers. The material employed, method utilized in development, performance and capacity of each transducer is presented. Finally, the importance and needs for modeling and simulation is discussed. Currently we design and modeling a micro size transducer in Intellisuite software.

Keywords: MEMS, acoustics transducer, underwater applications.