• P-ISSN 0974-6846 E-ISSN 0974-5645

Indian Journal of Science and Technology


Indian Journal of Science and Technology

Year: 2010, Volume: 3, Issue: 6, Pages: 627-629

Original Article

The effect of deposition parameters on the sensing behaviors of the SnO2: Cu nano-structure thin films including CO2-gas sensor


In this work, Cu-doped SnO2 thin films were deposited by spray pyrolysis method. The films were prepared using SnCl4 ,5H2O and CuCl2,2H2O hydro-alcoholic solution. Then, the sensitivity parameter of SnO2-based CO2-gas sensors is studied for various atomic percentages ([Cu]/[Sn] = 0, 2, 4, 6, 10,12.5,15, 20, 25). In addition, the effect of substrate temperature on the sensing behavior of films was also studied. The XRD and SEM structural analysis of thin film sensors confirm the nano-structure of the films with SnO2 cassiterite phase. The optical band gap of Cu doped- SnO2 films were obtained from optical absorption spectra by UV-Vis absorption spectroscopy. Measurement of the electrical resistivity of films shows that with increasing of Cu-doping in films up to 12.5%, the electrical resistivity increase sharply.
Keywords: Thin film, gas-sensors, metal-oxide, tin-oxide, nanostructure. 


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