The effect of deposition parameters on the sensing behaviors of the SnO2: Cu nano-structure thin films including CO2-gas sensor

H  Rezvani; N  Shahtahmasebi; M  Rezaee Rokn Abadi and H  Arabshahi

doi:10.17485/ijst/2010/v3i6.10

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The effect of deposition parameters on the sensing behaviors of the SnO2: Cu nano-structure thin films including CO2-gas sensor

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Indian Journal of Science and Technology

DOI: 10.17485/ijst/2010/v3i6.10

Year: 2010, Volume: 3, Issue: 6, Pages: 627-629

Original Article

The effect of deposition parameters on the sensing behaviors of the SnO2: Cu nano-structure thin films including CO2-gas sensor

H. Rezvani, N. Shahtahmasebi, M. Rezaee Rokn-Abadi and H. Arabshahi ^*

Physics Department, Ferdowsi University of Mashhad, Mashhad, Iran
[email protected]

This work is licensed under a Creative Commons Attribution 4.0 International License.

Abstract

In this work, Cu-doped SnO₂ thin films were deposited by spray pyrolysis method. The films were prepared using SnCl₄ ,5H₂O and CuCl₂,2H₂O hydro-alcoholic solution. Then, the sensitivity parameter of SnO_2-based CO_2-gas sensors is studied for various atomic percentages ([Cu]/[Sn] = 0, 2, 4, 6, 10,12.5,15, 20, 25). In addition, the effect of substrate temperature on the sensing behavior of films was also studied. The XRD and SEM structural analysis of thin film sensors confirm the nano-structure of the films with SnO₂ cassiterite phase. The optical band gap of Cu doped- SnO₂ films were obtained from optical absorption spectra by UV-Vis absorption spectroscopy. Measurement of the electrical resistivity of films shows that with increasing of Cu-doping in films up to 12.5%, the electrical resistivity increase sharply.
Keywords: Thin film, gas-sensors, metal-oxide, tin-oxide, nanostructure.