Indian Journal of Science and Technology

Abstract

Objective: RF MEMS has emerged as a technology with immense potential for wireless communication and defence applications. In this work, a 5 bit RF MEMS switched line phase shifter is presented using cantilever switch achieving low actuation voltage. Methodology: In this work 5 different phase shifters are designed to get 5 bit phase shift at a particular frequency 10 GHz. The phase shifters consist of stubs like structure designed in the ground of CPW and MEMS capacitive series switches. Solid-state phase shifters based on p-i-n diodes or Field-Effect Transistor (FET) switches are used because they provide a good planar solution at a variety of microwave frequency ranges. Micro Electro Mechanical Systems (MEMS) phase shifters are progress today are mainly have established designs because of which the solid-state switch is replaced by a MEMS switch. Findings: By analysing theoretically and practically the results showed that a novel RF MEMS switch was capable of liberating less than 0.1dB insertion loss and more than 19 dB isolation between input and output ports at 20 GHz .This RF MEMS switch shows a 5V actuation voltage. Switching time of RF MEMS switches is measured using a theoretical approach. The switches demonstrated maximum switching time of 0.1µs. By using this switch a 5-bit miniaturized phase shifter is designed i.e. 180° bit, 90°, 45°, 22.25° and 11.5° bits were achieved using the switched line type phase shifters at 10 GHz. A novel switched line type phase shifter loaded with multiple switch pairs was developed and was capable of liberating a multiple phase shift angles within single design.
Keywords: Actuation Voltage, Cantilever Beam, Insertion Loss, Phase Error, Phase Shift, Return Loss, Stress